UTC2000／3000_Cuwirekitattachingprocedures.doc

UTC2000／3000_Cuwirekitattachingprocedures.doc

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UTC-2000/UTC-3000

CuWireKit

AttachingProcedures

AC584020

SHINKAWALTD.

1 Components 2

2 AttachingofComponents 3

3 PositionAdjustmentofGasChamberUnit 7

4 OtherOperations 10

1Components

Name

Qty.

Component

Remarks

TorchElectrode

1

TorchelectrodemaybeincorporatedinGasChamberUnit

GasChamberUnit

1

[Accessoryscrew]

M2.6×8（Capscrew）:

1pc

M2.6×12（Capscrew）:

1pc

M2.6（Springwasher）:

2pcs

M2.6（Washer）:

2pcs

InsulatingPlate

1

CapillaryHeightAdjustmentJig

1

J10711（UTC-3000）

Chamber-TorchHeightAlignmentJig

1

J10712

TorchPositioningJig

1

J10717

TorchPositioningJig

1

J10718

2AttachingofComponents

注意

1）Shutdownthemachineandturnoffthepower.

WPandHPmaintainhighheatrightafterthemachinepowerwasturnedoff.Bewareofthatinworking.

Attention

Fig.1Bondingheadbeforeattachingcomponents

2）Removesideillumination（IL-204）asFig.2indicates.

Fig.2Removalofsideillumination

3）Removecomponentsmadeofglass-epoxyresinontorchunitasFig.3indicates.

Fig.3　Removaloftorchunit

4）RemovethegaschamberunitendasFig.4indicates.

Fig.4　Removalofgaschamberunitend

5）AttachTorchpositioningjig（J10717）toapartwheregaschamberunitendwasremoved.Then,attachthetorchelectrodeandfixitwithsetscrew,puttingtheendoftorchelectrodeonthejigasFig.6indicates.

Afterfixingthetorchelectrode,removethetorchpositioningjig.

TorchElectrode

Puttheendoftorchelectrodeonthejig

Torchpositioningjig

J10717

SetScrew

M2×3

Fig.5　Attachingoftorchelectrode　　　　　Fig.6Positionadjustmentoftorchelectrode

6）AttachgaschamberunitasFig.7indicates.

Makesuretouseaccessoryscrewsforfixingthegaschamberunit.

Gaschamberunit

SUSCapScrew M2.6×10

Washer M2.6

Springwasher M2.6

SUSCapscrew　M2.6×12

Washer M2.6

SpringwasherM2.6

Fig.7　Attachingofgaschamberunit

7）Fixtheterminaloftorchhigh-voltagecableasFig.8indicates.

Terminaloftorchhigh-voltagecable

Fig.8　Terminalconnectionoftorchhigh-voltagecable

8）RemovethesideilluminationreflectorasFig.9indicatesandattachaninsulatingplateandsideillumination.

Insulatingplate

Reflector

Fig.9Attachingofsideillumination

3PositionadjustmentofGasChamberUnit

Beforetheadjustmentwork,turnthemachinepoweronandraisethetemperatureofpre,main,andafterheaterstothepresettemperature.Transfersamplestobondingstage,attachacapillary,andadjusttheheightofheaterblockinsuchawaythatthesecondbondinglevelwillbe900um±50.

Inadjusting,performtheadjustmentwithsamplesclamped.

1）EachaxisinGasChamberUnitisadjustableasFig.10indicates.Loosenfixingscrewsoftheaxistobeadjustedandturntheadjustmentknobwithaslottedscrewdriverforfineadjustmentofposition.

Xfixingscrews

Yfixingscrew

X-axisadjustment

Z-axisadjustment

Y-axisadjustment

Zfixingscrews

Fig.10　Adjustmentmechanismofgaschamberunit

2）Attachingpositionofgaschamberunit

Torchelectrodeendandcapillarygapalignwithgoldwire.

Adjustthegapbetweenelectrodeendpartandcapillarycylinderpartusingthicknessgauges（J501,J502,andJ503）,sothatthegapwillbefrom0.1mmto0.15mm.Also,adjustthedistancebetweenthetopsurfaceofleadclamperandthebottomsurfaceofgaschamberunitto1.8mm（J10712topsurface）usingChamber-torchheightalignmentjig（J10712）.

J10712

0.1mm-0.15mm

1.8mm

Leadclamper

Fig.11Attachingpositionofgaschamberunit

3）Torchlevelsetting

PerformtorchlevelsettingatthepositionindicatedinFig.12.

TorchlevelsettingpositionoftorchelectrodeforthickCuwire

（Yellowarea）

TorchlevelsettingpositionoftorchelectrodeforthinCuwire

（Bluearea）

Fig.12Torchlevelsettingposition

4）RemovethecapillaryandattachthegaschamberunitendasFig.13indicates.

Fig.13Attachingofgaschamberunitend

4Otheroperations

1）Attaching/removingofcapillary

Inattaching/removingofcapillary,useacapillaryheightadjustmentjig（J10711）toadjustthecapillaryattachingheight.

2）TorchElectrodemaintenance

Whentorchelectrodeendisconsumedorexchanged,useTorchpositioningjig（J10718）toaligntheposition.

SetthejigasFig.14indicates,loosenthetorchelectrodefixingscrew,andputthetorchelectrodeendonthejigtofixwithfixingscrew.

Whenmaintainingthetorchelectrode,removinggaschamberunitendisunnecessary.Aslo,makesurenottoaligntheelectrodeendusingthegaschamberunitadjustmentmechanism.

TorchPositioningJig（J10718）

Fig.14　Howtousethetorchpositioningjig（J10718）

TorchElectrode

SetScrew

M2×3

Fig.15　TorchElectrodealignment

-10–

AC584020　UTC-2000/3000　CuWireKitAttachingProcedures