Thin film reference.docx
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Thin film reference.docx
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Thinfilmreference
Element
Symbol
Melting
Point°C
Density(bulk,g/cm3)
Z-ratio
Temperature°C@VaporPressure(Torr)
EvaporationMethod
Crucible
Boat
Remarks
10-8
10-6
10-4
Aluminum
Al
660
2.700
1.080
677
821
1010
eBeam(Xlnt),Thermal
TiB2-BN,ZrB2,BN
TiB2,W
Alloysandwets.FillBoat2/3.
Aluminum
Antimonide
AlSb
1080
4.3
--
--
--
--
--
--
--
--
Aluminum
Arsenide
AlAs
1600
3.7
--
--
--
~1300
--
-
--
--
Aluminum
Bromide
AlBr3
97
3.01
--
--
--
~50
--
G
Mo
--
Aluminum
Carbide
Al4C3
1400
2.36
--
--
--
~800
ebeam(Fair)
--
--
n=2.7
Aluminum
2%Copper
Al2%Cu
640
2.8
--
--
--
--
--
--
--
Wirefeedandflash.Difficultfromdualsources
Aluminum
Fluoride
AlF3
1257
3.07
--
410
490
700
eBeam(Poor)
G
Mo,W
n=1.38@.55µ
sublimes
........sublimes........
Aluminum
Nitride
AlN
--
3.26
--
--
--
~1750
ebeam(Fair)
--
--
Decomposes.Reactive
evaporatein
10-3N2withglowdischarge.
sublimes
Aluminum
Oxide(Alumina)
Al2O3
2045
3.970
0.336
--
--
1550
eBeam(Xlnt),sputter
--
W
Sapphirexlntinebeam,formssmooth,hardfilms.n=1.66
Aluminum
2%Silicon
Al2%Si
640
2.6
--
--
--
1010
--
TiB2-BN
--
Wirefeedandflash.Difficultfromdualsources.
Antimony
Sb
630
6.68
--
279
345
425
eBeam(Poor)
BN,C,Al2O3
Mo,Ta,Al2O3Coated
Toxic.Evaporateswell.Filmstructureisrate-dependent.
........sublimes........
AntimonyTelluride
Sb2Te3
619
6.50
--
--
--
600
--
C
--
Decomposesover750°C
AntimonyTrioxide
Sb2O3
656
5.2or5.76
--
--
--
~300
eBeam(Good)
BN,Al2O3
Pt
Toxic.DecomposesonW.n=2.05
........sublimes........
AntimonyTriselenide
Sb2Se3
611
--
--
--
--
--
--
C
Ta
Stoichiometryvariable
AntimonyTrisulphide
Sb2S3
550
4.64
--
--
--
~200
ebeam(Good)
Al2O3
Mo,Ta
n=3.01@.55µNoDecomposition.
Arsenic
As
814
5.73
--
107
150
210
eBeam(Poor)
Al2O3,BeO,VC
C
Toxic.Sublimesrapidlyatlowtemerature.
........sublimes........
ArsenicSelenide
As2Se3
360
4.75
--
--
--
--
--
Al2O3,Quartz
--
n=2.41@3.8µJVST10,748(1973)
ArsenicTrisulphide
As2S3
300
3.43
--
--
--
~400
ebeam(Fair)
Al2O3,Quartz
Mo
n=2.8JVST10,748(1973)
ArsenicTritelluride
As2Te3
362
--
--
--
--
--
--
--
Flash
JVST10,748(1975)
Barium
Ba
710
3.78
--
545
627
735
eBeam(Fair)
Metals
W,Ta,Mo
Wetsw/oalloying-reactswithceramics.
BariumChloride
BaCl2
962
3.86
--
--
--
~650
--
--
Ta,Mo
usegeneralpreheattooutgas.
BariumFluoride
BaF2
1280
4.83
--
--
--
~700
eBeam(Good)
--
Mo
n=1.29@5µJVST21,2052(1982)DensityRateDependent
........sublimes........
BariumOxide
BaO
1923
5.72or5.32
--
--
--
~1300
ebeam(Poor)
Al2O3
Pt
Decomposesslightly.n=1.98
BariumSulphide
BaS
2200
4.25
--
--
--
1100
--
--
Mo
n=2.16
BariumTitanate
BaTiO3
Decomposes
6.0
--
........Decomposes........
--
--
--
Decomposes,yieldsfreeBafromsinglesource;sputteringpreferred;orco-evaporatefrom2sources
Beryllium
Be
1278
1.85
--
710
878
1000
eBeam(Xlnt)
BeO,C,Vit.Carbon
W,Ta
WetsW/Mo/Ta.Metalpowderandoxidesaretoxic.Evaporateseasily.
BerylliumChloride
BeCl2
440
1.90
--
--
--
~150
--
--
--
--
BerylliumFluoride
BeF2
800
1.99
--
--
--
~200
eBeam(Good)
--
--
Toxic.
........sublimes........
BerylliumOxide
BeO
2530
3.01
--
--
--
1900
ebeam(Good)
--
--
Powderstoxic.NodecompositionfromEBguns.n=1.72
Bismuth
Bi
271
9.80
--
330
410
520
eBeam(Xlnt)
Al2O3,VC
W,Mo,Al2O3,Ta
Vaporsaretoxic.Highresistivity.Noshortingofbaskets.
BismuthFluoride
BiF3
727
8.75
--
--
--
~300
--
G
--
n=1.74@1µ,1.64@10µApp.Opt.18,105(1979)
........sublimes........
BismuthOxide
Bi2O3
820
8.9
--
--
--
~1400
ebeam(Poor)
--
Pt
Vaporsaretoxic.n=2.55.JVST12,63(1975)
BismuthSelenide
Bi2Se3
710
7.66
--
--
--
~650
ebeam(Good)
G,Quartz
--
Sputteringpreferred;co-evaporatefrom2sources.
BismuthTelluride
Bi2Te3
585
7.85
--
--
--
~600
--
G,Quartz
W,Mo
Sputteringpreferred;co-evaporatefrom2sources.
BismuthTitanate
Bi2Ti2O7
--
--
--
........Decomposes........
--
--
--
Decomposes.Sputteringpreferred;orco-evaporatefrom2sourcesin10-2O2.
BismuthTrisulphide
Bi2S3
685
7.39
--
--
--
--
--
--
--
n=1.5
Boron
B
2100
2.36
0.389
1278
1548
1797
eBeam(Xlnt),sputter
C,VC
C
Materialexplodeswithrapidcooling.Formscarbidewithcontainer.
........sublimes........
BoronCarbide
B4C
2350
2.50
--
2500
2580
2650
ebeam(xlnt)
--
--
similartoChromium.
BoronNitride
BN
2300
2.20
--
--
--
~1600
eBeam(Poor)
--
--
Sputteringpreferred;Decomposes.
........sublimes........
BoronOxide
B2O3
460
1.82
--
--
--
~1400
ebea
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