单晶注意Single crystal attention.docx
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单晶注意Single crystal attention.docx
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单晶注意Singlecrystalattention
单晶注意(Singlecrystalattention)
Singlecrystaltraining
AconcisecourseoftrainingforCZSINGLECRYSTALworkers
Section1equipmentcognition
Requirementsforcrystalgrowth
1..Highpurityhygieneofpolycrystallinerawmaterials,productionequipmentandproductionenvironmentmustbemaintained;
2.crystalgrowthiscarriedoutathightemperature.Inordertoavoidtheoxidationofsilicon,itmustbecarriedoutundervacuumsystemandprotectivegas(argon);
Wemustkeepthespeedandtemperaturestabilityintheprocessofpulling3;
Two.ThecompositionofCZsinglecrystalfurnace
Accordingtotherequirementsofcrystalgrowth,theCzochralskisinglecrystalfurnacemainlyconsistsofsixparts:
furnacebody,electricalpart,heatsystem,watercoolingsystem,vacuumsystemandargonsupplydevice;
The1.furnacebodyincludesliftinghead,auxiliaryfurnacechamber(upperfurnacechamber),mainfurnacechamber,pedestalandotherparts;
2.electricalpartincludesspeedpart,heatingpart,vacuumsystemcontrol,argoncontrol,furnacebarrelliftingcontrolandsoon;
The2.1speedpartconsistsoffourparts:
theupperandlowershaftspeeds(SL),theuppershaftspeeds(SR),theloweranduppershaftspeeds(CL),andthelowershaftspeeds(CR);
Thespeedofthe2.2normalwhenpulling:
SL:
directionandsizecontrolcanbecontrolledbytouchscreenorcrystalbox.Thetwocanbeconvertedtoeachother.Attentionshouldbepaidtothepowersupplyofthecrystalboxtoavoidaccidentswhentheoperatorisnotinfrontofthefurnace!
Normalwhenpullinginabout1.2-SLnumericalrangeabout0.6mm/min;
CL:
thedirectionandsizecontrolbythetouchscreen,thenormalchangeofthesizeofthecrystalwithSLandthechangeinproportiontoCL/SL;commonlyknownasthecrucibletrackproportion;thecrucibletrackproportionwithcrystaldrawingsizechanges;intheactualpullingprocessinatimelymannertoverifythecrucibletrackproportiontodetermineitscorrectnessandjudgmentcrystaldiameter;
SR:
commonlyknownascrystal,directionandsizecontrolbythetouchscreenpanel;normalpullingSRwas1013r/min;clockwise;
CR:
commonlyknownasthecruciblerotationdirectionandsize,controlledbythetouchscreen,thenormalCR8r/mincrystal;inseedingmaterial,canadjustitsspeedassoonaspossibletoadjustthetemperaturetoapropervalue;
Requirements:
1.intwoworkingdaysmustbeproficientinfourspeedcontrol;
2.abletodrawn6inchand8inch(155mm)crystalforthecrucibletrackproportionisthenumber?
3.in3workingdaysmustmastertheheatingpart,vacuumsystemcontrol,argoncontrol,furnacebarrelliftingcontroloperation;
3.Thermalsystem
Theheatsystemconsistsofgraphiteheater,heatpreservationsystem,supportsystem,supportingrod,supportingbowlandguidetube;
Thesecondsectionpullingprocess
Charge
1.preparationbeforecharging
(1)confirmthattheequipmentinspectionitemshavebeencompleted
(2)checkwhethertheholeisgoodornot
(3)readydisposablegloves,threadgloves,scissors,masks,highpuritycarsandotherancillarysupplies
(4)removethepolycrystallinematerialandmaterialonalayerofmaterialfromthecarchargingcabinet,checkwhethertheerror.
(5)withdisposablegloves(analysisofpureopponentshurt),wipethefurnacepaperwithalcohol,cleanthehighpuritycar
(6)willrisefirstcruciblepositionlimit.
2.checkandinstallquartzcrucible
(1)openthecruciblebox,packwithdisposablegloves,andputthecrucibleandplasticpackagingtogetheronthehighpuritycar
(2)opentheplasticpackage,changethedisposablegloves,andinspectthecrucibletothelightsourcetoseeifitcanbeused
Note:
oneofthefollowingfeaturescannotbeused
Thebumpdamage(intinybumpsalongthecrucibleexcept).
Crack
Severescratch
Thediameterlargerthan3mmbubblesandblackspots,numberlessthan1.(Note:
bubblehole.CaughtinthecruciblewallinBlack:
coloredimpurities.)
Thediameterof<3mmbubblesandblackspots,numbermorethan5.
Thediameterof<3mmbubblesandblackspots,thetotalnumberofmorethan5.
(3)checkcanbeusedafterthecrucibleintothreevalveshouldbeinstalledinthecrucible,level(20."Thecrucibleisrelativelyheavy,canbeinstalledtwo)
(4)contactthemonitorintimeifthecrucibleisfoundabnormal
3.Reclaimer
3.1takeandhandlethepolycrystallinerawmaterialsmustbehandledwithlight,strictlyprohibittheroughhandlingofpackagingbagscauseddamage;
Three
2productionoperationsstaffopenthepolycrystallinepackagingbagmustcomplywiththefollowingprovisions:
theouterpackinglayerloadingcarriagecutpolycrystalline(withhighpurity;gloves)butdoesnotallowaccesstosecondlayerpackagingbagwithhighpurityfromtheglovepolycrystallinematerialstwobagsandcutoffathighpurity(upperloadingcarriageforthisoperationisnotallowedwhenitcomesincontactwithanouterpackingbag;polycrystalline)thepolycrystallinematerialmustbeinstalledwithtwonylongloves:
glovesandplasticglovesofhighpurity;
4.Putontheclothes,takeamaskandgloves,thencutthebagforloading
1,willrisetotheupperlimitofcrucible;checkthequalityofthequartzcrucible;thequartzcrucibleintoagraphitecrucible;
Thechoiceofsmallpiecesofmaterialatthebottomofthecrucible(diameterlessthan20mm)placement,shouldbecoveredwiththebottomofthecrucible.
Apieceofmaterialselectioninthelowercrucible(diameterlessthan40mm)intothepolycrystallinematerialcanbeloadedcompactandclosetothecruciblewall,butshouldbenaturalstack,ratherthansqueeze.
Thechoiceofbulkmaterial(centralcruciblediameterlargerthan70mm)closetotheedgeofcrucibleinstalled,andensurethesymmetricalload.Thecentralcruciblecanbeloadedintomoderate,small,smallpiecesofmaterial.
Theupperblockselectioncruciblemoderateandsmall,inadditiontothetoplayer,canstillbeclosetotheedge.Finallyacrucibleloadedlayer,canconsciouslychoosesomematerial,makeoutstandingmaterialcruciblealong10-20mm,butcannotrideinthecrucible.Thefollowingpointsshouldbenoted:
Ireducethematerialcontactareablockandtheedgeofthecrucible,topreventthehangingedge.
Ineachblock,betweentherelativeposition,toestimateintheblockcaving,whetherthebridge,thenmakethecorrespondingadjustment.
(4)problemsneedingattentioninchargingprocess:
Mustensurethatthematerialblockgentlycontactwiththecrucibleofthechargingprocess,toavoidanycollision.
Duringthechargingprocess,itisforbiddentocontactthepolycrystallinerawmaterialwiththeoutersurfaceofthebagdirectlyorindirectly
Duringtheloadingprocess,itisfoundthatthedisposableglovesarebrokenandshouldbereplacedintime
Nomatterwheretheupper,middleandlowerpartsare,thesharppartofthematerialcannotdirectlyfacethecruciblewall
Attentionshouldbepaidtothechargingprocesstopreventthematerialintothefurnace
Ifthedopingshouldbeinstalledinthecentraldopedquartzcrucible.Avoiddregswhendopingisproposed;
Iftherawmaterialsofsmallerdiameter(lessthan1mm),morewillbeoverloadedquartzcruciblecannotcharge,butshouldmaketheedgeofthequartzcruciblefromthecruciblemouthtokeep20mmdistance;toavoidheatingthepolycrystallinematerialexpansionandoverflowaccidentcausedbyShiYingguo;
4.Bahrainisexpectedtomeltcruciblecrucibleposition.(18"-115,20"systemsystemGuoGuo-103)
Whenthe5.cruciblefallstothedesignatedposition,theclothesarestrippedoff,andthelargecapandthedrafttubeareloadedintothefurnacewithadisposableglove
6.replacethedisposablegloves,checkthedistancebetweentheguidetubeandthepolycrystallinematerial,whetherthecruciblecanbeallowedtorotate
7.afterchecking,takedisposablegloves,wipethefurnacecover,auxiliarychamber,sealingsurfaceoffurnacecoverandfurnacebarrel,thesealingsurfaceofauxiliarychamberandfurnacecoverandflashboardvalve,andthenclosethefurnacecoverandclosetheflashboardvalve
8.drophammer,checkwhethertheseedcanplay,thewireropeiswrappedaroundtheburrorisloose,thesteelwireropeischuckburroriswrappedloose,suchasburrorpineiswrappedinatimelymannertoreturnorreplacement.
9.checktheerror,thenclosetheDeputyroom,opentheflashboardvalve
10.changetheparametersinthecomputer
(1)changetheinitialcharge(kg)parametersfortheactualquantityoffeeding.
Operationalsteps:
theprocessparametersontheoperationinterface,appearinitializationinterface,theinitialloadingquantity(kg)theactualforthequantityoffeeding.
(2)changethetracking/feedingweightofthecrucibletotheactualfeedingweight
Operationsteps:
trackingtheinterfacepointofthecrucible,crucibleappearstrackingcontrolringinterface,changethefeedingweightforthecruciblematerial.Iftheactualweightofstep
(1),theautomaticvacuumpumpingprocess,thefeedweightwillautomaticallymodifyandinitializethefeedingweight.
Note:
thisparameterisveryimportant,ifthesetvalueandtheactualvaluedoesnotmatch,willcausethecalculationwhenthediameterofthecomputerwiththeactualGuoGuowithinconsistent.Itisworthnotingthatinaperiodwhenpullingstick,ifyouuseautomaticisolationprocedures,automaticcalculationofthecomputer,donotneedtomanuallymodify;
Ifmanualisolationisused,theresidualweightinthecomputercrucibleneedstobemanuallymodified
11.seeiftheprocessparametersofeachstepinthecomputeraresetc
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