文献翻译采用表面微加工技术制造微型行星齿轮减速器Word格式文档下载.docx
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文献翻译采用表面微加工技术制造微型行星齿轮减速器Word格式文档下载.docx
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英文原文
MICROPLANETARYREDUCTIONGEARUSINGSURFACE-MICROMACHINING
Abstract
Amicroplanetarygearmechanismfeaturingahighgearreductionratiowithcompactnessinsizeispresentedinthispaper.SUMMiTVisemployedforthefabricationmethodsothattheredundancyofassemblingpartsiseliminated.Thedesignrulesofwhichhasalsobeenchecked.Tomakefulluseofthebenefitsofthesurface-micro-machining,theplanetaryreductiongearisdesignedtowardusingtheon-chipmicro-engine.Theexpectedgearreductionratioiscalculatedandcomparedwiththeconventionalchaingearmechanism.Themicroplanetarygearmechanismpresentedinthispaperisexpectedtohave162:
1reductionratioutilizinglessspaceconsumption.Thisisanorderofmagnitudehigherthanthepreviouslyreporteddesigninasinglereductiongeartrain.
Keywords:
MEMS,planetarygear,reductiongearsurface-micromachining,SUMMiTVprocess
Nomenclature
asungear
bplanetgears
cinternalgear(fixed)
dinternalgear(rotary)
nthenumberofunitsofgeartrain
Ddiameterofthepitchcircle
Nnumberofteeth
Pnumberofplanets
angularvelocity
Introduction
Thegearmechanismsinmicroelectromechanicalsystems(MEMS)arecommonlyexpectedtogeneratehightorqueintheconfinedmicro-sizesystems.However,itisgenerallydifficultforthemicro-scalesystemstohavesuchahightorquewithouthavingmultiplereductionsystems.
Thedesignofthereductiongeardrivebasedonaplanetaryparadoxgearmechanismcanincreasethetorquewithinacompactarea,sincethemicroplanetarygearsystemhasanadvantageofhighreductionratioperunitvolume[1].Howeveritsmechanismissocomplicatedthatrelativelyfewattemptshavebeenmadetominiaturizethegearsystems[2-3].Suzumorietal.[2]usedthemechanicalparadoxplanetarygearmechanismtodrivearobotfor1-inpipesforwardorbackward.Theyemployedasinglemotortodrivethegearmechanismswithhighreductionratio.Precisegearfabricationwasenabledbymicrowireelectricaldischargemachining(micro-EDM).Theseparts,however,shouldbeassembledbeforethedrivemotorisattachedtothegearbox.Takeuchiet.al.[3]alsousedmicro-EDMtofabricatethemicroplanetarygears.TheysuggestedspecialcermetsorHighCarbonSteelforpossiblematerials.Whilethedesigncanachieveareductionratioof200,thegearsshouldalsobeassembledandmotordriven.Toenablethedrivingoftheplanetarygearbyonchipmeans,SandiaUltra-planarMulti-levelMEMSTechnology(SUMMiT-V)process[4]forplanetarygearfabricationisadoptedinthisstudy.TheSUMMiT-Vprocessistheonlyfoundryprocessavailablewhichutilizesfourlayersofreleasablepolysilicon,foratotaloffivelayers(includingagroundplane)[5].Duetothisfact,itisfrequentlyusedincomplicatedgearmechanismsbeingdrivenbyon-chipelectrostaticactuators[5].However,inmanycases,themicroenginesmaynotproduceenoughtorquetodrivethedesiredmechanicalload,sincetheirelectrostaticcombdrivestypicallyonlygenerateafewtensofmicronewtonsofforce.Fortunately,theseenginescaneasilybedrivenattensofthousandsofrevolutionsperminutes.Thismakesitveryfeasibletotradespeedfortorque[7].Rodgersetal.[7]proposedtwoduallevelgearswithanoverallgearreductionratioof12:
1.Thussixofthesemodulartransmissionassembliescanhavea2,985,984:
1reductionratioatthecostofthehugespace.
Withthedesireforsizecompactnessandatthesametime,highreductionratios,theplanetarygearsystemispresentedinthispaper.Itwillbethefirstplanetarygearmechanismusingsurfacemicromachining,totheauthorsknowledge.Theprinciplesofoperationsoftheplanetarygearmechanism,fabrication,andtheexpectedperformanceoftheplanetarygearsystemsaredescribedinthispaper.
Principlesofoperation
Analternativewayofusinggearstotransmittorqueistomakeoneormoregears,i.e.,planetarygears,rotateoutsideofonegear,i.e.sungear.Mostplanetaryreductiongears,atconventionalsize,areusedaswell-knowncompactmechanicalpowertransmissionsystems[1].TheschematicoftheplanetarygearsystememployedisshowninFigure
SinceSUMMiTVdesignsarelaidoutusingAutoCAD2000,theFigure1isgeneratedautomaticallyfromthelayoutmasks(Appendix[1]).Oneunitoftheplanetarygearsystemiscomposedofsixgears:
onesungear,a,threeplanetarygears,b,onefixedringgear,c,onerotatingringgear,d,andoneoutputgear.Thenumberofteethforeachgearisdifferentfromoneanotherexceptamongtheplanetarygears.Aninputgearisthesungear,a,drivenbythearmconnectedtothemicro-engine.Therotatingringgear,d,isservedasanoutputgear.Forexample,ifthearmdrivesthesungearintheclockwisedirection,theplanetarygears,b,willrotatecoun
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