光刻技术及应用.docx
- 文档编号:10309471
- 上传时间:2023-02-10
- 格式:DOCX
- 页数:10
- 大小:151.40KB
光刻技术及应用.docx
《光刻技术及应用.docx》由会员分享,可在线阅读,更多相关《光刻技术及应用.docx(10页珍藏版)》请在冰豆网上搜索。
光刻技术及应用
Lithography
Lithography(fromGreekλ?
?
θο?
?
lithos,"stone"+γρ?
?
φειν,graphein,"towrite")isamethodofprintingoriginallybasedontheprinciplethatoilandwaterdonotmix.[1]Printingisfromastone(lithographiclimestone)orametalplatewithasmoothsurface.Itwasinventedin1796byGermanauthorandactorAloisSenefelderasacheapmethodofpublishingtheatricalworks.[2][3]Lithographycanbeusedtoprinttextorartworkontopaperorothersuitablematerial.[4]
Lithographyoriginallyusedanimagedrawnwithoil,fat,orwaxontothesurfaceofasmooth,levellithographiclimestoneplate.Thestonewastreatedwithamixtureofacidandgumarabic,etchingtheportionsofthestonewhichwerenotprotectedbythegrease-basedimage.Whenthestonewassubsequentlymoistened,theseetchedareasretainedwater;anoil-basedinkcouldthenbeappliedandwouldberepelledbythewater,stickingonlytotheoriginaldrawing.Theinkwouldfinallybetransferredtoablankpapersheet,producingaprintedpage.Thistraditionaltechniqueisstillusedinsomefineartprintmakingapplications.
Inmodernlithography,theimageismadeofapolymercoatingappliedtoaflexiblealuminumplate.Theimagecanbeprinteddirectlyfromtheplate(theorientationoftheimageisreversed),oritcanbeoffset,bytransferringtheimageontoaflexiblesheet(rubber)forprintingandpublication.
Asaprintingtechnology,lithographyisdifferentfromintaglioprinting(gravure),whereinaplateiseitherengraved,etched,orstippledtoscorecavitiestocontaintheprintingink;andwoodblockprinting,andletterpressprinting,whereininkisappliedtotheraisedsurfacesoflettersorimages.Today,mosttypesofhigh-volumebooksandmagazines,especiallywhenillustratedincolour,areprintedwithoffsetlithography,whichhasbecomethemostcommonformofprintingtechnologysincethe1960s.Thewordlithographyalsodenotesphotolithography,amicrofabricationtechniqueusedinthemicroelectronicsindustrytomakeintegratedcircuitsandmicroelectromechanicalsystems.
Theprincipleoflithography
Lithographyusessimplechemicalprocessestocreateanimage.Forinstance,thepositivepartofanimageisawater-repelling("hydrophobic")substance,whilethenegativeimagewouldbewater-retaining("hydrophilic").Thus,whentheplateisintroducedtoacompatibleprintinginkandwatermixture,theinkwilladheretothepositiveimageandthewaterwillcleanthenegativeimage.Thisallowsaflatprintplatetobeused,enablingmuchlongerandmoredetailedprintrunsthantheolderphysicalmethodsofprinting(e.g.,intaglioprinting,letterpressprinting).
LithographywasinventedbyAloisSenefelderinBohemiain1796.Intheearlydaysoflithography,asmoothpieceoflimestonewasused(hencethename"lithography":
"lithos"(λιθο?
?
)istheancientGreekwordforstone).Aftertheoil-basedimagewasputonthesurface,asolutionofgumarabicinwaterwasapplied,thegumstickingonlytothenon-oilysurface.Duringprinting,wateradheredtothegumarabicsurfacesandavoidedtheoilyparts,whiletheoilyinkusedforprintingdidtheopposite.
Lithographyonlimestone
LithographystoneandmirrorimageprintofamapofMunich
Lithographyworksbecauseofthemutualrepulsionofoilandwater.Theimageisdrawnonthesurfaceoftheprintplatewithafatoroil-basedmedium(hydrophobic)suchasawaxcrayon,whichmaybepigmentedtomakethedrawingvisible.Awiderangeofoil-basedmediaisavailable,butthedurabilityoftheimageonthestonedependsonthelipidcontentofthematerialbeingused,anditsabilitytowithstandwaterandacid.Afterthedrawingoftheimage,anaqueoussolutionofgumarabic,weaklyacidifiedwithnitricacidHNO3isappliedtothestone.Thefunctionofthissolutionistocreateahydrophiliclayerofcalciumnitratesalt,Ca(NO3)2,andgumarabiconallnon-imagesurfaces.Thegumsolutionpenetratesintotheporesofthestone,completelysurroundingtheoriginalimagewithahydrophiliclayerthatwillnotaccepttheprintingink.Usinglithographicturpentine,theprinterthenremovesanyexcessofthegreasydrawingmaterial,butahydrophobicmolecularfilmofitremainstightlybondedtothesurfaceofthestone,rejectingthegumarabicandwater,butreadytoaccepttheoilyink.[5]
Whenprinting,thestoneiskeptwetwithwater.Naturallythewaterisattractedtothelayerofgumandsaltcreatedbytheacidwash.Printinginkbasedondryingoilssuchaslinseedoilandvarnishloadedwithpigmentisthenrolledoverthesurface.Thewaterrepelsthegreasyinkbutthehydrophobicareasleftbytheoriginaldrawingmaterialacceptit.Whenthehydrophobicimageisloadedwithink,thestoneandpaperarerunthroughapresswhichappliesevenpressureoverthesurface,transferringtheinktothepaperandoffthestone.
Senefelderhadexperimentedduringtheearly19thcenturywithmulticolorlithography;inhis1819book,hepredictedthattheprocesswouldeventuallybeperfectedandusedtoreproducepaintings.[2]Multi-colorprintingwasintroducedbyanewprocessdevelopedbyGodefroyEngelmann(France)in1837knownaschromolithography.[2]Aseparatestonewasusedforeachcolor,andaprintwentthroughthepressseparatelyforeachstone.Themainchallengewastokeeptheimagesaligned(inregister).Thismethodlentitselftoimagesconsistingoflargeareasofflatcolor,andresultedinthecharacteristicposterdesignsofthisperiod.
"Lithography,orprintingfromsoftstone,largelytooktheplaceofengravingintheproductionofEnglishcommercialmapsafterabout1852.Itwasaquick,cheapprocessandhadbeenusedtoprintBritisharmymapsduringthePeninsulaWar.Mostofthecommercialmapsofthesecondhalfofthe19thcenturywerelithographedandunattractive,thoughaccurateenough."[6]
Themodernlithographicprocess
A1902lithographmap(originalsize33×24cm)
High-volumelithographyisusedpresentlytoproduceposters,maps,books,newspapers,andpackaging—justaboutanysmooth,mass-produceditemwithprintandgraphicsonit.Mostbooks,indeedalltypesofhigh-volumetext,arenowprintedusingoffsetlithography.
Foroffsetlithography,whichdependsonphotographicprocesses,flexiblealuminum,polyester,mylarorpaperprintingplatesareusedinsteadofstonetablets.Modernprintingplateshaveabrushedorroughenedtextureandarecoveredwithaphotosensitiveemulsion.Aphotographicnegativeofthedesiredimageisplacedincontactwiththeemulsionandtheplateisexposedtoultravioletlight.Afterdevelopment,theemulsionshowsareverseofthenegativeimage,whichisthusaduplicateoftheoriginal(positive)image.TheimageontheplateemulsioncanalsobecreatedbydirectlaserimaginginaCTP(Computer-To-Plate)deviceknownasaplatesetter.Thepositiveimageistheemulsionthatremainsafterimaging.Non-imageportionsoftheemulsionhavetraditionallybeenremovedbyachemicalprocess,thoughinrecenttimesplateshavecomeavailablewhichdonotrequiresuchprocessing.
LithographypressforprintingmapsinMunich
Theplateisaffixedtoacylinderonaprintingpress.Dampeningrollersapplywater,whichcoverstheblankportionsoftheplatebutisrepelledbytheemulsionoftheimagearea.Hydrophobicink,whichisrepelledbythewaterandonlyadherestotheemulsionoftheimagearea,isthenappliedbytheinkingrollers.
Ifthisimageweretransferreddirectlytopaper,itwouldcreateamirror-typeimageandthepaperwouldbecometoowet.Instead,theplaterollsagainstacylindercoveredwitharubberblanket,whichsqueezesawaythewater,picksuptheinkandtransfersittothepaperwithuniformpressure.Thepaperpassesbetweentheblanketcylinderandacounter-pressureorimpressioncylinderandtheimageistransferredtothepaper.Becausetheimageisfirsttransferred,oroffsettotherubberblanketcylinder,thisreproductionmethodisknownasoffsetlithographyoroffsetprinting.[7]
Manyinnovationsandtechnicalrefinementshavebeenmadeinprintingprocessesandpressesovertheyears,includingthedevelopmentofpresseswithmultipleunits(eachcontainingoneprintingplate)thatcanprintmulti-colorimagesinonepassonbothsidesofthesheet,andpressesthataccommodatecontinuousrolls(webs)ofpaper,knownaswebpresses.AnotherinnovationwasthecontinuousdampeningsystemfirstintroducedbyDahlgreninsteadoftheoldmethodwhichisstillusedonolderpresses(conventionaldampening),whicharerollerscoveredwithmolleton(cloth)whichabsorbsthewater.Thisincreasedcontrolofthewaterflowtotheplateandallowedforbetterinkandwaterbalance.Currentdampeningsystemsincludea"deltaeffectorvario"whichslowstherollerincontactwiththeplate,thuscreatingasweepingmovementovertheinkimagetocleanimpuritiesknownas"hickies".
ArchiveoflithographicstonesinMunich
Theprocessoflithographyprintingisseenhere.[8]Thissimplifiedversionofalithographicprintingpressgivesyouanideaofhowtheprintingprocessworks.Thispressisalsocalledaninkpyramidduetothefactthattheinkistransferredthroughseverallayersofrollerswithdifferentpurposes.Thelithographicprintingpressesarecommonlyusedinnewspaperproductionwherefastrollingandjumpingrollsareafamouspartofthepressingsceneineverynewspaperproductionmovie.
Theadventofdesktoppublishingmadeitpossiblefortypeandimagestobemodifiedeasilyonpersonalcomputersforeventualprintingbydesktoporcommercialpresses.Thedevelopmentofdigitalimagesettersenabledprintshopstoproducenegativesforp
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- 光刻 技术 应用